@misc{indiciaef9b60e5670a2,
  title = {Tailoring the properties of YBa\$\_\{2\}\$Cu\$\_\{3\}\$O\$\_\{7-δ\}\$ thin films by 30 keV He\$\textasciicircum{}+\$ irradiation: An enabling route to superconducting device nanopatterning},
  author = {Bernd Aichner and Simon Koch and Philipp A. Korner and Max Karrer and Katja Wurster and Christoph Schmid and Ulrich Kentsch and Reinhold Kleiner and Edward Goldobin and Dieter Koelle and Wolfgang Lang},
  year = {2026},
  url = {https://arxiv.org/abs/2606.14588},
  note = {Source identifier: 2606.14588}
}