@misc{indiciaeaf3b9c61b61f,
  title = {Design and Fabrication of a Spin Coater with In-Situ Optical Measurement for Soft Thin Films},
  author = {Daniel Gliksberg and Jiajie Qiu and Jun Suzuki and Kamal Youcef-Toumi},
  year = {2026},
  doi = {10.1109/aim65483.2026.11658143},
  url = {https://arxiv.org/abs/2606.15068},
  note = {Source identifier: 2606.15068}
}