@misc{indiciaee331654bf229, title = {Epitaxial Growth of Ultra-smooth \$δ\$-NbN Thin Films on TiN-Buffered Sapphire by Room-Temperature Sputtering}, author = {Swagata Bhunia and Aakash Shandilya and Sounak Samanta and Bikash C Barik and Soumyadip Chatterjee and Parushottam Majhi and Siddarth Rastogi and Kantimay Das Gupta and Suddhasatta Mahapatra and Apurba Laha}, year = {2026}, url = {https://arxiv.org/abs/2606.18447}, note = {Source identifier: 2606.18447} }