@misc{indiciae5504273ad739,
  title = {Determination of the intrinsic mechanical quality factor in high-stress silicon nitride resonators},
  author = {Geena Benga and Vincent Dumont and Wei Wang and Nicola Cavalleri and Ariane Giesriegl and Silvan Schmid and Christian L. Degen and Antonius Armanious and Alexander Eichler},
  year = {2026},
  url = {https://arxiv.org/abs/2606.20354},
  note = {Source identifier: 2606.20354}
}