@misc{indiciaea50488f664e9,
  title = {Plasma Etch Process Optimization for Photonic-Grade Diamond-on-Insulator Substrates and Thickness Evaluation using Colorimetry},
  author = {Tianyin Chen and Alessio Miranda and Leyla Rami and Ryoichi Ishihara and Salahuddin Nur},
  year = {2026},
  url = {https://arxiv.org/abs/2606.20412},
  note = {Source identifier: 2606.20412}
}