TY  - RPRT
TI  - Plasma Etch Process Optimization for Photonic-Grade Diamond-on-Insulator Substrates and Thickness Evaluation using Colorimetry
AU  - Tianyin Chen
AU  - Alessio Miranda
AU  - Leyla Rami
AU  - Ryoichi Ishihara
AU  - Salahuddin Nur
PY  - 2026
UR  - https://arxiv.org/abs/2606.20412
ID  - 2606.20412
ER  -