@misc{indiciaeac5d3c4c2636,
  title = {Enhanced electron-beam lithography to reduce the frequency scatter of 200-400 GHz superconducting microstrip resonators for on-chip filterbank spectrometers},
  author = {L. G. G. Olde Scholtenhuis and D. J. Thoen and J. J. A. Baselmans and K. Karatsu and L. H. Martin and S. Vollebregt and A. Endo},
  year = {2026},
  url = {https://arxiv.org/abs/2606.21348},
  note = {Source identifier: 2606.21348}
}