TY  - RPRT
TI  - Enhanced electron-beam lithography to reduce the frequency scatter of 200-400 GHz superconducting microstrip resonators for on-chip filterbank spectrometers
AU  - L. G. G. Olde Scholtenhuis
AU  - D. J. Thoen
AU  - J. J. A. Baselmans
AU  - K. Karatsu
AU  - L. H. Martin
AU  - S. Vollebregt
AU  - A. Endo
PY  - 2026
UR  - https://arxiv.org/abs/2606.21348
ID  - 2606.21348
ER  -