@misc{indiciae8d758486d09e, title = {A correlation of structural changes with nanomechanical properties in TiN-AlN multilayer films}, author = {Nidhin George Mathews and Aidan A. Taylor and Johannes Zechner and Helmut Riedl and Paul H. Mayrhofer and Johann Michler and Vipin Chawla and Gaurav Mohanty}, year = {2026}, url = {https://arxiv.org/abs/2606.22222}, note = {Source identifier: 2606.22222} }