TY - RPRT TI - A correlation of structural changes with nanomechanical properties in TiN-AlN multilayer films AU - Nidhin George Mathews AU - Aidan A. Taylor AU - Johannes Zechner AU - Helmut Riedl AU - Paul H. Mayrhofer AU - Johann Michler AU - Vipin Chawla AU - Gaurav Mohanty PY - 2026 UR - https://arxiv.org/abs/2606.22222 ID - 2606.22222 ER -