@misc{indiciaeae10c2f15bbf,
  title = {Alignment-Free Nanometric Optical Metrology Enabled by Structured Light},
  author = {Yu Wang and Benquan Wang and Eng Aik Chan and Songze Li and Zhenyu Guo and Xi Xie and Masako Kishida and Che-Chin Chen and Yijie Shen and Jun-Yu Ou},
  year = {2026},
  url = {https://arxiv.org/abs/2606.22366},
  note = {Source identifier: 2606.22366}
}