@misc{indiciae832ed16f60e9,
  title = {High-Fidelity Synthetic Transmission Electron Microscopy Image Generation Using Diffusion Probabilistic Models for Data-Limited Semiconductor Metrology},
  author = {Johannes Boehm and Bappaditya Dey},
  year = {2026},
  url = {https://arxiv.org/abs/2606.24817},
  note = {Source identifier: 2606.24817}
}