TY  - RPRT
TI  - High-Fidelity Synthetic Transmission Electron Microscopy Image Generation Using Diffusion Probabilistic Models for Data-Limited Semiconductor Metrology
AU  - Johannes Boehm
AU  - Bappaditya Dey
PY  - 2026
UR  - https://arxiv.org/abs/2606.24817
ID  - 2606.24817
ER  -