@misc{indiciae2c4f183dc2b6,
  title = {Pseudo-spectral frequency-domain method with background field decomposition and Green's function preconditioner for electromagnetic scattering problem in EUV lithography},
  author = {Seungjin Lee and Werner Gillijns and Doyun Kim},
  year = {2026},
  url = {https://arxiv.org/abs/2606.25541},
  note = {Source identifier: 2606.25541}
}