TY  - RPRT
TI  - Pseudo-spectral frequency-domain method with background field decomposition and Green's function preconditioner for electromagnetic scattering problem in EUV lithography
AU  - Seungjin Lee
AU  - Werner Gillijns
AU  - Doyun Kim
PY  - 2026
UR  - https://arxiv.org/abs/2606.25541
ID  - 2606.25541
ER  -