@misc{indiciae2e2c63e6218b,
  title = {Gradient-based inverse lithography for EUV masks via the waveguide method and a physics-informed neural operator},
  author = {Vasiliy A. Es'kin and Egor V. Ivanov},
  year = {2026},
  url = {https://arxiv.org/abs/2606.25753},
  note = {Source identifier: 2606.25753}
}