TY  - RPRT
TI  - Gradient-based inverse lithography for EUV masks via the waveguide method and a physics-informed neural operator
AU  - Vasiliy A. Es'kin
AU  - Egor V. Ivanov
PY  - 2026
UR  - https://arxiv.org/abs/2606.25753
ID  - 2606.25753
ER  -