@misc{indiciae1542e8e3cd87,
  title = {HF Etching and Silanization: Evidence for the Role of Surface Hydroxyl Groups in Silicon Nitride Resonator Loss},
  author = {Ariane Giesriegl and Nicola Cavalleri and Robert West and Antonius Armanious and Markus Sauer and Thomas Schachinger and Silvan Schmid},
  year = {2026},
  url = {https://arxiv.org/abs/2606.26838},
  note = {Source identifier: 2606.26838}
}