TY  - RPRT
TI  - HF Etching and Silanization: Evidence for the Role of Surface Hydroxyl Groups in Silicon Nitride Resonator Loss
AU  - Ariane Giesriegl
AU  - Nicola Cavalleri
AU  - Robert West
AU  - Antonius Armanious
AU  - Markus Sauer
AU  - Thomas Schachinger
AU  - Silvan Schmid
PY  - 2026
UR  - https://arxiv.org/abs/2606.26838
ID  - 2606.26838
ER  -