@misc{indiciaefe6fde0ef590,
  title = {High yield creation of germanium vacancy centers in diamond by focused ion beam implantation and high temperature annealing},
  author = {S. Dietel and E. Scattolo and J. Fuhrmann and L. Kazak and A. Cian and E. Missale and D. Giubertoni and F. Jelezko},
  year = {2026},
  doi = {10.1088/2633-4356/aea514},
  url = {https://arxiv.org/abs/2606.28528},
  note = {Source identifier: 2606.28528}
}