TY - RPRT TI - High yield creation of germanium vacancy centers in diamond by focused ion beam implantation and high temperature annealing AU - S. Dietel AU - E. Scattolo AU - J. Fuhrmann AU - L. Kazak AU - A. Cian AU - E. Missale AU - D. Giubertoni AU - F. Jelezko PY - 2026 DO - 10.1088/2633-4356/aea514 UR - https://arxiv.org/abs/2606.28528 ID - 2606.28528 ER -