@misc{indiciae9c7bbb9e8bd2, title = {Vertical \$β\$-Ga\$\_2\$O\$\_3\$ Schottky Diodes with Deep-Etch Field Termination using Plasma-free Ga-assisted Etching}, author = {Saleh Ahmed Khan and Ahmed Ibreljic and Anhar Bhuiyan}, year = {2026}, url = {https://arxiv.org/abs/2606.28942}, note = {Source identifier: 2606.28942} }