TY - RPRT TI - Vertical $β$-Ga$_2$O$_3$ Schottky Diodes with Deep-Etch Field Termination using Plasma-free Ga-assisted Etching AU - Saleh Ahmed Khan AU - Ahmed Ibreljic AU - Anhar Bhuiyan PY - 2026 UR - https://arxiv.org/abs/2606.28942 ID - 2606.28942 ER -