@misc{indiciaee53bd4bbe371,
  title = {Accelerated development of amorphous InZnO thin films as transparent conductive Cu diffusion barriers},
  author = {Stefanie Frick and Reyu Sakakibara and Manuel Kober-Czerny and Arnold Müller and Miloš Baljozović and Franz-Josef Haug and Sebastian Siol},
  year = {2026},
  url = {https://arxiv.org/abs/2606.31605},
  note = {Source identifier: 2606.31605}
}