@misc{indiciae699ebadc07d2, title = {Monolithic Integration of Piezo-Optomechanical Photonics and CMOS Electronics}, author = {Matthew Zimmermann and Aileen Zhai and Andrew J. Leenheer and Julia Boyle and Mayank Mishra and Daniel Dominguez and Matthew Koppa and Wolf Jehle and Christopher Panuski and Mark Dong and Gerald Gilbert and Dirk Englund and Matt Eichenfield}, year = {2026}, url = {https://arxiv.org/abs/2607.01514}, note = {Source identifier: 2607.01514} }