@misc{indiciae3fe5e5fbf6a6,
  title = {Sequential Multi-Step Nanoimprint Lithography Fabrication of Zero-Mode Waveguide Nanoaperture Arrays to Enhance Single Molecule Fluorescence Detection},
  author = {Hamza Khelidj and Badre Kerzabi and Igor Ozerov and Olivier Hector and David Grosso and Jérôme Wenger},
  year = {2026},
  url = {https://arxiv.org/abs/2607.09141},
  note = {Source identifier: 2607.09141}
}