TY  - RPRT
TI  - Sequential Multi-Step Nanoimprint Lithography Fabrication of Zero-Mode Waveguide Nanoaperture Arrays to Enhance Single Molecule Fluorescence Detection
AU  - Hamza Khelidj
AU  - Badre Kerzabi
AU  - Igor Ozerov
AU  - Olivier Hector
AU  - David Grosso
AU  - Jérôme Wenger
PY  - 2026
UR  - https://arxiv.org/abs/2607.09141
ID  - 2607.09141
ER  -