@misc{indiciae7b5da0920ba5,
  title = {SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography},
  author = {Thomas Van Caekenberghe and Paul Steinacker and Bart Raes and Sofie Beyne and Clement Godfrin and Jacques Van Damme and Sylvain Baudot and Arne Loenders and Gulzat Jaliel and Stefan Kubicek and Johan De Backer and Yannick Hermans and Sugandha Sharma and Shuchi Kaushik and Yuchao Jiang and Yosuke Shimura and Roger Loo and Vukan Levajac and Kristof Moors and George Simion and Florian K. Unseld and Ensar Vahapoglu and Ajit Dash and Tuomo Tanttu and Chris C. Escott and Chih Hwan Yang and Andre Saraiva and Arne Laucht and Wee Han Lim and Nard Dumoulin Stuyck and Massimo Mongillo and Danny Wan and Andrew S. Dzurak and Kristiaan De Greve},
  year = {2026},
  url = {https://arxiv.org/abs/2607.13121},
  note = {Source identifier: 2607.13121}
}