@misc{indiciaea5c75ca4040b,
  title = {Scalable Fabrication of Diamond-on-Silica Heterostructures via High-Selectivity Deep ICP-RIE and Room-Temperature Bonding},
  author = {R. Chembra Vasudevan and A. Hammouti and J. Le Pouliquen and T. Batte and P. Pirasteh and Y. Dumeige and P. Huillery},
  year = {2026},
  doi = {10.1016/j.diamond.2026.113992},
  url = {https://arxiv.org/abs/2607.14978},
  note = {Source identifier: 2607.14978}
}