@misc{indiciae622facc50c15, title = {Spontaneous Nanopatterning and Strain Relaxation in SiGe Layers Grown by Oxidative Solid Phase Epitaxy}, author = {Sophie E. Bierer and Trevor R. Smith and Arezoo Mafi and Sunzhuoran Wang and Chengqian Liao and Vatsalkumar Patel and Andrew P. Knights and Ryan B. Lewis}, year = {2026}, url = {https://arxiv.org/abs/2607.15332}, note = {Source identifier: 2607.15332} }