@misc{indiciae616b3ecdbb90,
  title = {Non-invasive monitoring of process-relevant plasma parameters by Fiber PROES in capacitively coupled Ar/CF\$\_4\$ plasmas},
  author = {Florian Beckfeld and Maximilian Ryppa and Constantin Neuroth and Li Wang and Ihor Korolov and Julian Schulze},
  year = {2026},
  url = {https://arxiv.org/abs/2607.16075},
  note = {Source identifier: 2607.16075}
}