TY  - RPRT
TI  - Non-invasive monitoring of process-relevant plasma parameters by Fiber PROES in capacitively coupled Ar/CF$_4$ plasmas
AU  - Florian Beckfeld
AU  - Maximilian Ryppa
AU  - Constantin Neuroth
AU  - Li Wang
AU  - Ihor Korolov
AU  - Julian Schulze
PY  - 2026
UR  - https://arxiv.org/abs/2607.16075
ID  - 2607.16075
ER  -