@misc{indiciae15969a20dc79, title = {Subgrain-resolved Analysis of Degradation in Cu Metallization via Scanning 3DXRD and Thermomechanical Modeling}, author = {Nikhil Prabhu and Laura Neumann and Michael Reisinger and James A. D. Ball and Cedric Corley-Wiciak and Manuel Petersmann and Agnieszka Corley-Wiciak and Jonathan Wright and Carsten Detlefs and Martin Diehl}, year = {2026}, url = {https://arxiv.org/abs/2607.16108}, note = {Source identifier: 2607.16108} }