TY  - RPRT
TI  - Subgrain-resolved Analysis of Degradation in Cu Metallization via Scanning 3DXRD and Thermomechanical Modeling
AU  - Nikhil Prabhu
AU  - Laura Neumann
AU  - Michael Reisinger
AU  - James A. D. Ball
AU  - Cedric Corley-Wiciak
AU  - Manuel Petersmann
AU  - Agnieszka Corley-Wiciak
AU  - Jonathan Wright
AU  - Carsten Detlefs
AU  - Martin Diehl
PY  - 2026
UR  - https://arxiv.org/abs/2607.16108
ID  - 2607.16108
ER  -