@misc{indiciae51d4c4fce3c8,
  title = {Does Super-Resolution Preserve Defect Evidence? A Low-False-Call Benchmark for Semiconductor Inspection},
  author = {Shaoliang Yang and Jun Wang},
  year = {2026},
  url = {https://arxiv.org/abs/2607.17401},
  note = {Source identifier: 2607.17401}
}