@misc{indiciae972e35cec3db,
  title = {An Implicit Time-Domain Harmonic Balance Method for Radio-Frequency Capacitively Coupled Plasma Simulations},
  author = {Yuze Zhu and Yufeng Wei and Yue Zhang and Kun Xu},
  year = {2026},
  url = {https://arxiv.org/abs/2607.18103},
  note = {Source identifier: 2607.18103}
}