TY  - RPRT
TI  - An Implicit Time-Domain Harmonic Balance Method for Radio-Frequency Capacitively Coupled Plasma Simulations
AU  - Yuze Zhu
AU  - Yufeng Wei
AU  - Yue Zhang
AU  - Kun Xu
PY  - 2026
UR  - https://arxiv.org/abs/2607.18103
ID  - 2607.18103
ER  -