@misc{indiciaecdce4f742a28,
  title = {Substrate-metal interface engineering enhances TaN/Ta thin film superconducting resonator performance},
  author = {Moritz Singer and Harsh Gupta and Benedikt Schoof and Elena Willinger and Anton Orekhov and Alexandra Schewski and Samuil Kostadinov and Philip Constantin Schneider and Marc Tornow},
  year = {2026},
  url = {https://arxiv.org/abs/2607.22294},
  note = {Source identifier: 2607.22294}
}