TY  - RPRT
TI  - Substrate-metal interface engineering enhances TaN/Ta thin film superconducting resonator performance
AU  - Moritz Singer
AU  - Harsh Gupta
AU  - Benedikt Schoof
AU  - Elena Willinger
AU  - Anton Orekhov
AU  - Alexandra Schewski
AU  - Samuil Kostadinov
AU  - Philip Constantin Schneider
AU  - Marc Tornow
PY  - 2026
UR  - https://arxiv.org/abs/2607.22294
ID  - 2607.22294
ER  -