@misc{indiciaebe157ca26a26, title = {Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD)}, author = {Karen Ang and Han-Teng Liao}, year = {2026}, url = {https://arxiv.org/abs/2607.23082}, note = {Source identifier: 2607.23082} }