TY  - RPRT
TI  - Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD)
AU  - Karen Ang
AU  - Han-Teng Liao
PY  - 2026
UR  - https://arxiv.org/abs/2607.23082
ID  - 2607.23082
ER  -