@misc{indiciaefc07e5c803ef,
  title = {Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation},
  author = {Doyun Kim and Werner Gillijns},
  year = {2026},
  url = {https://arxiv.org/abs/2607.25330},
  note = {Source identifier: 2607.25330}
}