TY  - RPRT
TI  - Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation
AU  - Doyun Kim
AU  - Werner Gillijns
PY  - 2026
UR  - https://arxiv.org/abs/2607.25330
ID  - 2607.25330
ER  -