@misc{indiciae838e90907f0d, title = {ICDAR 2026 Competition on Information Extraction from Atomic Layer Deposition/Etching (ALD/E) Scientific Figures}, author = {Fahad Ahmed and Sören Auer and Jennifer D'Souza}, year = {2026}, url = {https://arxiv.org/abs/2607.26848}, note = {Source identifier: 2607.26848} }