TY - RPRT TI - ICDAR 2026 Competition on Information Extraction from Atomic Layer Deposition/Etching (ALD/E) Scientific Figures AU - Fahad Ahmed AU - Sören Auer AU - Jennifer D'Souza PY - 2026 UR - https://arxiv.org/abs/2607.26848 ID - 2607.26848 ER -