@misc{indiciae9b9d6f0b1691,
  title = {STM study of single phosphorus incorporation into silicon by heating PBr3 on Si(100)},
  author = {Tatiana V. Pavlova and Vladimir M. Shevlyuga},
  year = {2026},
  doi = {10.1016/j.apsusc.2026.166813},
  url = {https://arxiv.org/abs/2607.27939},
  note = {Source identifier: 2607.27939}
}