TY  - RPRT
TI  - STM study of single phosphorus incorporation into silicon by heating PBr3 on Si(100)
AU  - Tatiana V. Pavlova
AU  - Vladimir M. Shevlyuga
PY  - 2026
DO  - 10.1016/j.apsusc.2026.166813
UR  - https://arxiv.org/abs/2607.27939
ID  - 2607.27939
ER  -