@misc{indiciae7e4d3efd76b2,
  title = {A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion},
  author = {Ning Hu and Chang Liu and Yunlei Jiang and Yuan Dong},
  year = {2026},
  url = {https://arxiv.org/abs/2608.00212},
  note = {Source identifier: 2608.00212}
}