TY  - RPRT
TI  - A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion
AU  - Ning Hu
AU  - Chang Liu
AU  - Yunlei Jiang
AU  - Yuan Dong
PY  - 2026
UR  - https://arxiv.org/abs/2608.00212
ID  - 2608.00212
ER  -