@misc{indiciae8a1d73c934d8,
  title = {MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype},
  author = {Xiaoyu Niu and Zihuan Liu and Ehsan Vatankhah and Yuqi Meng and Neal A. Hall},
  year = {2026},
  url = {https://arxiv.org/abs/2608.02203},
  note = {Source identifier: 2608.02203}
}